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The Melbourne Centre for Nanofabrication (MCN)
Melbourne Centre for Nanofabrication (MCN) is the largest and broadest capability within the Australian National Fabrication Facility (ANFF). It is the home to our lab with instruments such as electron beam lithography facility, FIB-SEM, DRIE, confocal microscopy and state-of-the-art cleanrooms at class 10,000 and class 100.
Deep-reactive ion etcher, e-beam lithography, e-beam evaporator, hot embosser
FEG-SEM, FIB-SEM, and laser scanning confocal microcope